JPH0544825B2 - - Google Patents

Info

Publication number
JPH0544825B2
JPH0544825B2 JP60132216A JP13221685A JPH0544825B2 JP H0544825 B2 JPH0544825 B2 JP H0544825B2 JP 60132216 A JP60132216 A JP 60132216A JP 13221685 A JP13221685 A JP 13221685A JP H0544825 B2 JPH0544825 B2 JP H0544825B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
reaction chamber
gas
support plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60132216A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61289623A (ja
Inventor
Naoki Suzuki
Junichi Nozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13221685A priority Critical patent/JPS61289623A/ja
Publication of JPS61289623A publication Critical patent/JPS61289623A/ja
Publication of JPH0544825B2 publication Critical patent/JPH0544825B2/ja
Granted legal-status Critical Current

Links

JP13221685A 1985-06-18 1985-06-18 気相反応装置 Granted JPS61289623A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13221685A JPS61289623A (ja) 1985-06-18 1985-06-18 気相反応装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13221685A JPS61289623A (ja) 1985-06-18 1985-06-18 気相反応装置

Publications (2)

Publication Number Publication Date
JPS61289623A JPS61289623A (ja) 1986-12-19
JPH0544825B2 true JPH0544825B2 (en]) 1993-07-07

Family

ID=15076101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13221685A Granted JPS61289623A (ja) 1985-06-18 1985-06-18 気相反応装置

Country Status (1)

Country Link
JP (1) JPS61289623A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06103663B2 (ja) * 1987-01-21 1994-12-14 東京エレクトロン株式会社 処理装置
FI97730C (fi) * 1994-11-28 1997-02-10 Mikrokemia Oy Laitteisto ohutkalvojen valmistamiseksi
FI97731C (fi) * 1994-11-28 1997-02-10 Mikrokemia Oy Menetelmä ja laite ohutkalvojen valmistamiseksi
FI100409B (fi) 1994-11-28 1997-11-28 Asm Int Menetelmä ja laitteisto ohutkalvojen valmistamiseksi
JP3477953B2 (ja) * 1995-10-18 2003-12-10 東京エレクトロン株式会社 熱処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113420A (ja) * 1983-11-22 1985-06-19 Mitsubishi Electric Corp 半導体結晶の製造装置
JPS60178621A (ja) * 1984-02-24 1985-09-12 Toshiba Corp 薄膜形成装置

Also Published As

Publication number Publication date
JPS61289623A (ja) 1986-12-19

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